Vacuum chamber for deposition of gradient thin films: Toward high-throughput structure-property correlative studies

Author:

Lapkin, Dmitry; Nasro, Roody; Hagara, Jakub; Hofferberth, Bernd; Hinderhofer, Alexander; Gerlach, Alexander; Schreiber, Frank

Tübinger Autor(en):

Published in:

Review of Scientific Instruments (2025), Bd. 96 (5), Article 053905

Verlagsangabe:

Melville : Aip Publishing

Language:

English

Full text:

ISSN:

0034-6748

DDC Classifikation:

530 - Physics
600 - Technology

Dokumentart:

Article

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