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| Author: | Loeffler, Ronny; Fleischer, Monika; Kern, Dieter P.; Matschegewski, Claudia; Staehlke, Susanne; Nebe, Barbara; Lange, Regina | |
| Tübinger Autor(en): |
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| Published in: | Journal of Vacuum Science & Technology B (2012), Bd. 30, Article 06F901 | |
| Verlagsangabe: | A V S Amer Inst Physics | |
| Language: | English | |
| Full text: | http://dx.doi.org/10.1116/1.4757109 | |
| ISSN: | 1071-1023 | |
| DDC Classifikation: |
530 - Physics 600 - Technology |
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| Dokumentart: | Article | |
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